Apparatus for laser assisted thin film deposition
- Pleasanton, CA
A pulsed laser deposition apparatus uses fiber optics to deliver visible output beams. One or more optical fibers are coupled to one or more laser sources, and delivers visible output beams to a single chamber, to multiple targets in the chamber or to multiple chambers. The laser can run uninterrupted if one of the deposition chambers ceases to operate because other chambers can continue their laser deposition processes. The laser source can be positioned at a remote location relative to the deposition chamber. The use of fiber optics permits multi-plexing. A pulsed visible laser beam is directed at a generally non-perpendicular angle upon the target in the chamber, generating a plume of ions and energetic neutral species. A portion of the plume is deposited on a substrate as a thin film. A pulsed visible output beam with a high pulse repetition frequency is used. The high pulse repetition frequency is greater than 500 Hz, and more preferably, greater than about 1000 Hz. Diamond-like-carbon (DLC) is one of the thin films produced using the apparatus.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Number(s):
- US 5490912
- OSTI ID:
- 870291
- Country of Publication:
- United States
- Language:
- English
Similar Records
Spectroscopic study of carbon plasma produced by the first (1064 nm) and second (532 nm) harmonics of Nd:YAG laser
Design And Performance Of Optical Detectors Fabrication Setup Using Pulsed Laser Deposition (PLD)
Related Subjects
laser
assisted
film
deposition
pulsed
fiber
optics
deliver
visible
output
beams
optical
fibers
coupled
sources
delivers
single
chamber
multiple
targets
chambers
run
uninterrupted
ceases
operate
processes
source
positioned
remote
location
relative
permits
multi-plexing
beam
directed
non-perpendicular
angle
target
generating
plume
energetic
neutral
species
portion
deposited
substrate
pulse
repetition
frequency
500
hz
preferably
1000
diamond-like-carbon
dlc
films
produced
deposition chambers
output beams
single chamber
visible laser
film deposition
pulse repetition
fiber optics
deposition chamber
output beam
optical fibers
fiber optic
laser beam
optical fiber
pulsed laser
deposition process
laser source
remote location
repetition frequency
deposition processes
deposition apparatus
laser deposition
visible output
location relative
multiple target
multiple targets
neutral species
films produced
laser sources
/204/118/