Controlled removal of ceramic surfaces with combination of ions implantation and ultrasonic energy

Patent · Sun Jan 01 00:00:00 EST 1995

OSTI ID:870008

Boatner, Lynn A ^[1]; Rankin, Janet ^[2]; Thevenard, Paul ^[3]; Romana, Laurence J ^[4]

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1. Oak Ridge, TN
2. Providence, RI
3. Caluire, FR
4. Gaudeloupe Antilles, FR

A method for tailoring or patterning the surface of ceramic articles is provided by implanting ions to predetermined depth into the ceramic material at a selected surface location with the ions being implanted at a fluence and energy adequate to damage the lattice structure of the ceramic material for bi-axially straining near-surface regions of the ceramic material to the predetermined depth. The resulting metastable near-surface regions of the ceramic material are then contacted with energy pulses from collapsing, ultrasonically-generated cavitation bubbles in a liquid medium for removing to a selected depth the ion-damaged near-surface regions containing the bi-axially strained lattice structure from the ceramic body. Additional patterning of the selected surface location on the ceramic body is provided by implanting a high fluence of high-energy, relatively-light ions at selected surface sites for relaxing the bi-axial strain in the near-surface regions defined by these sites and thereby preventing the removal of such ion-implanted sites by the energy pulses from the collapsing ultrasonic cavitation bubbles.

• Research Organization: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
• DOE Contract Number: AC05-84OR21400
• Assignee: Martin Marietta Energy Systems, Inc. (Oak Ridge, TN)
• Patent Number(s): US 5437729
• OSTI ID: 870008
• Country of Publication: United States
• Language: English

Related Subjects

controlled
removal
ceramic
surfaces
combination
implantation
ultrasonic
energy
method
tailoring
patterning
surface
articles
provided
implanting
predetermined
depth
material
selected
location
implanted
fluence
adequate
damage
lattice
structure
bi-axially
straining
near-surface
regions
resulting
metastable
contacted
pulses
collapsing
ultrasonically-generated
cavitation
bubbles
liquid
medium
removing
ion-damaged
containing
strained
additional
high-energy
relatively-light
sites
relaxing
bi-axial
strain
defined
preventing
ion-implanted
selected surface
regions containing
surface region
ceramic article
ultrasonic energy
ceramic material
near-surface regions
ceramic articles
lattice structure
liquid medium
ultrasonic cavitation
surface location
predetermined depth
near-surface region
energy pulse
energy pulses
ceramic surface
ceramic surfaces
surface regions
ceramic mater
/134/216/427/