Dissipation factor as a predictor of anodic coating performance

Patent · Sun Jan 01 00:00:00 EST 1995

OSTI ID:869850

Panitz, Janda K. G. ^[1]

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1. Edgewood, NM

A dissipation factor measurement is used to predict as-anodized fixture performance prior to actual use of the fixture in an etching environment. A dissipation factor measurement of the anodic coating determines its dielectric characteristics and correlates to the performance of the anodic coating in actual use. The ability to predict the performance of the fixture and its anodized coating permits the fixture to be repaired or replaced prior to complete failure.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: FI04-89AL58872
• Assignee: Sematech, Inc. (Austin, TX)
• Patent Number(s): US 5410256
• OSTI ID: 869850
• Country of Publication: United States
• Language: English

Related Subjects

dissipation
factor
predictor
anodic
coating
performance
measurement
predict
as-anodized
fixture
prior
etching
environment
determines
dielectric
characteristics
correlates
ability
anodized
permits
repaired
replaced
complete
failure
anodized coating
dissipation factor
factor measurement
/324/204/205/427/