Unitaxial constant velocity microactuator

Patent · Sat Jan 01 00:00:00 EST 1994

OSTI ID:869343

McIntyre, Timothy J ^[1]

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1. Knoxville, TN

A uniaxial drive system or microactuator capable of operating in an ultra-high vacuum environment. The mechanism includes a flexible coupling having a bore therethrough, and two clamp/pusher assemblies mounted in axial ends of the coupling. The clamp/pusher assemblies are energized by voltage-operated piezoelectrics therewithin to operatively engage the shaft and coupling causing the shaft to move along its rotational axis through the bore. The microactuator is capable of repeatably positioning to sub-manometer accuracy while affording a scan range in excess of 5 centimeters. Moreover, the microactuator generates smooth, constant velocity motion profiles while producing a drive thrust of greater than 10 pounds. The system is remotely controlled and piezoelectrically driven, hence minimal thermal loading, vibrational excitation, or outgassing is introduced to the operating environment.

• Research Organization: National Inst. of Standards and Technology (NIST), Gaithersburg, MD (United States)
• DOE Contract Number: AI05-81OR20806
• Assignee: Martin Marietta Energy Systems, Inc. (Oak Ridge, TN)
• Patent Number(s): US 5319257
• OSTI ID: 869343
• Country of Publication: United States
• Language: English

Related Subjects

unitaxial
constant
velocity
microactuator
uniaxial
drive
capable
operating
ultra-high
vacuum
environment
mechanism
flexible
coupling
bore
therethrough
clamp
pusher
assemblies
mounted
axial
energized
voltage-operated
piezoelectrics
therewithin
operatively
engage
shaft
causing
move
rotational
axis
repeatably
positioning
sub-manometer
accuracy
affording
scan
range
excess
centimeters
moreover
generates
smooth
motion
profiles
producing
thrust
10
pounds
remotely
controlled
piezoelectrically
driven
hence
minimal
thermal
loading
vibrational
excitation
outgassing
introduced
rotational axis
operating environment
bore therethrough
remotely controlled
vacuum environment
ultra-high vacuum
minimal thermal
thermal loading
thermal load
constant velocity
flexible coupling
remotely control
electrically driven
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