Apparatus and method to enhance X-ray production in laser produced plasmas
Patent
·
OSTI ID:868617
- Albuquerque, NM
Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser.
- Research Organization:
- AT&T
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- Sandia Corporation-Org. 250 (Albuquerque, NM)
- Patent Number(s):
- US 5175757
- OSTI ID:
- 868617
- Country of Publication:
- United States
- Language:
- English
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apparatus
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steps
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producing
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including
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method
enhance
x-ray
production
laser
produced
plasmas
generating
x-rays
instance
photolithography
steps
providing
target
irradiating
produces
train
sub-pulses
generate
producing
plasma
intensity
duration
vacuum
chamber
supported
including
storage
time
laser produced
vacuum chamber
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generating x-rays
produced plasmas
produced plasma
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