Acoustic wave device using plate modes with surface-parallel displacement
- Albuquerque, NM
Solid-state acoustic sensors for monitoring conditions at a surface immersed in a liquid and for monitoring concentrations of species in a liquid and for monitoring electrical properties of a liquid are formed by placing interdigital input and output transducers on a piezoelectric substrate and propagating acoustic plate modes therebetween. The deposition or removal of material on or from, respectively, a thin film in contact with the surface, or changes in the mechanical properties of a thin film in contact with the surface, or changes in the electrical characteristics of the solution, create perturbations in the velocity and attenuation of the acoustic plate modes as a function of these properties or changes in them.
- Research Organization:
- AT&T
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 5117146
- OSTI ID:
- 868315
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
wave
device
plate
modes
surface-parallel
displacement
solid-state
sensors
monitoring
conditions
surface
immersed
liquid
concentrations
species
electrical
properties
formed
placing
interdigital
input
output
transducers
piezoelectric
substrate
propagating
therebetween
deposition
removal
material
respectively
film
contact
changes
mechanical
characteristics
solution
create
perturbations
velocity
attenuation
function
acoustic plate
plate modes
acoustic wave
mechanical properties
electrical properties
electrical characteristics
wave device
piezoelectric substrate
acoustic sensors
plate mode
monitoring electrical
electrical characteristic
acoustic sensor
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