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Title: Thin-film spectroscopic sensor

Patent ·
OSTI ID:868141
 [1]
  1. Richland, WA
+ Show Author Affiliations

There is disclosed an integrated spectrometer for chemical analysis by evanescent electromagnetic radiation absorption in a reaction volume. The spectrometer comprises a noninteractive waveguide, a substrate, an entrance grating and an exit grating, an electromagnetic radiation source, and an electromagnetic radiation sensing device. There is further disclosed a chemical sensor to determine the pressure and concentration of a chemical species in a mixture comprising an interactive waveguide, a substrate, an entrance grating and an exit grating, an electromagnetic radiation source, and an electromagnetic radiation sensing device.

Research Organization:
Battelle Memorial Institute, Columbus, OH (United States)
DOE Contract Number:
AC06-76RL01830
Assignee:
Board of University of Washington (Seattle, WA); Battelle Development Corporation (Richland, WA)
Patent Number(s):
US 5082629
OSTI ID:
868141
Country of Publication:
United States
Language:
English

References (10)

Grating couplers as integrated optical humidity and gas sensors journal April 1985
Sensitivity of grating couplers as integrated-optical chemical sensors journal January 1989
Embossing technique for fabricating integrated optical components in hard inorganic waveguiding materials journal January 1983
Fabrication of tapers and lenslike waveguides by a microcontrolled dip coating procedure journal January 1988
Sensitivity of integrated optical grating and prism couplers as (bio)chemical sensors journal November 1988
Integrated optical switches and gas sensors journal January 1984
Integrated optical input grating couplers as biochemical sensors journal November 1988
Efficient grating couplers for polymer waveguides journal January 1987
Interaction of aqueous solutions with grating couplers used as integrated optical sensors and their pH behaviour journal December 1988
Embossing technique for fabricating surface relief gratings on hard oxide waveguides journal January 1986

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Related Subjects

thin-film
spectroscopic
sensor
disclosed
integrated
spectrometer
chemical
analysis
evanescent
electromagnetic
radiation
absorption
reaction
volume
comprises
noninteractive
waveguide
substrate
entrance
grating
exit
source
sensing
device
determine
pressure
concentration
species
mixture
comprising
interactive
radiation absorption
reaction volume
active waveguide
radiation sensing
chemical analysis
chemical sensor
electromagnetic radiation
chemical species
radiation source
sensing device
mixture comprising
chemical specie
spectrometer comprises
evanescent electromagnetic
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