Soft x-ray reduction camera for submicron lithography

Patent · Tue Jan 01 00:00:00 EST 1991

OSTI ID:867756

Hawryluk, Andrew M ^[1]; Seppala, Lynn G ^[2]

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1. 2708 Rembrandt Pl., Modesto, CA 95356
2. 7911 Mines Rd., Livermore, CA 94550

Soft x-ray projection lithography can be performed using x-ray optical components and spherical imaging lenses (mirrors), which form an x-ray reduction camera. The x-ray reduction is capable of projecting a 5x demagnified image of a mask onto a resist coated wafer using 4.5 nm radiation. The diffraction limited resolution of this design is about 135 nm with a depth of field of about 2.8 microns and a field of view of 0.2 cm.sup.2. X-ray reflecting masks (patterned x-ray multilayer mirrors) which are fabricated on thick substrates and can be made relatively distortion free are used, with a laser produced plasma for the source. Higher resolution and/or larger areas are possible by varying the optic figures of the components and source characteristics.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Hawryluk, Andrew M. (2708 Rembrandt Pl., Modesto, CA 95356);Seppala, Lynn G. (7911 Mines Rd., Livermore, CA 94550)
• Patent Number(s): US 5003567
• OSTI ID: 867756
• Country of Publication: United States
• Language: English

Related Subjects

soft
x-ray
reduction
camera
submicron
lithography
projection
performed
optical
components
spherical
imaging
lenses
mirrors
form
capable
projecting
5x
demagnified
image
mask
resist
coated
wafer
nm
radiation
diffraction
limited
resolution
design
135
depth
field
microns
view
cm
reflecting
masks
patterned
multilayer
fabricated
thick
substrates
relatively
distortion
free
laser
produced
plasma
source
larger
varying
optic
figures
characteristics
laser produced
projection lithography
optical components
soft x-ray
diffraction limited
nm radiation
x-ray reduction
x-ray multilayer
coated wafer
reduction camera
multilayer mirror
resist coated
optical component
distortion free
x-ray optical
x-ray projection
imaging lenses
imaging lens
produced plasma
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