Apparatus for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom

Patent · Tue Jan 08 00:00:00 EST 1991

OSTI ID:867670

Tom, Glenn M ^[1]; Brown, Duncan W ^[2]

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1. New Milford, CT
2. Wilton, CT

An apparatus for purifying a gaseous mixture comprising arsine, phosphine, ammonia, and/or inert gases, to remove Lewis acid and/or oxidant impurities therefrom, comprising a vessel containing a bed of a scavenger, the scavenger including a support having associated therewith an anion which is effective to remove such impurities, such anion being selected from one or more members of the group consisting of: (i) carbanions whose corresponding protonated compounds have a pK.sub.a value of from about 22 to about 36; and (ii) anions formed by reaction of such carbanions with the primary component of the mixture.

• Research Organization: ADVANCED TECHNOLOGY MATERIALS
• DOE Contract Number: AC01-87ER80469
• Assignee: Advanced Technology Materials, Inc. (New Milford, CT)
• Patent Number(s): US 4983363
• Application Number: 07/163,792
• OSTI ID: 867670
• Country of Publication: United States
• Language: English

Related Subjects

apparatus
purifying
arsine
phosphine
ammonia
inert
gases
remove
lewis
acid
oxidant
impurities
therefrom
gaseous
mixture
comprising
vessel
containing
bed
scavenger
including
support
associated
therewith
anion
effective
selected
consisting
carbanions
corresponding
protonated
compounds
pk
value
22
36
ii
anions
formed
reaction
primary
component
inert gases
lewis acid
gaseous mixture
inert gas
mixture comprising
vessel containing
associated therewith
anions formed
primary component
remove lewis
impurities therefrom
/422/96/423/502/