Multi-chamber deposition system

Patent · Tue Jun 27 00:00:00 EDT 1989

OSTI ID:867017

Jacobson, Richard L ^[1]; Jeffrey, Frank R ^[2]; Westerberg, Roger K ^[3]

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1. Roseville, MN
2. Shoreview, MN
3. Cottage Grove, MN

A system for the simultaneous deposition of different coatings onto a thin web within a large volume vacuum chamber is disclosed which chamber is provided with a plurality of deposition chambers in which the different layers are deposited onto the film as its moves from a supply roll to a finished take-up roll of coated web. The deposition chambers provided within the large vacuum chamber are provided with separate seals which minimize back diffusion of any dopant gas from adjacent deposition chambers.

• DOE Contract Number: ZB-4-03056-2
• Assignee: Minnesota Mining and Manufacturing Company (St. Paul, MN)
• Patent Number(s): US 4841908
• Application Number: 07/156,548
• OSTI ID: 867017
• Country of Publication: United States
• Language: English

Related Subjects

multi-chamber
deposition
simultaneous
coatings
web
volume
vacuum
chamber
disclosed
provided
plurality
chambers
layers
deposited
film
moves
supply
roll
finished
take-up
coated
separate
seals
minimize
diffusion
dopant
gas
adjacent
deposition chambers
deposition chamber
vacuum chamber
volume vacuum
supply roll
multi-chamber deposition
simultaneous deposition
take-up roll
chamber deposition
dopant gas
/118/136/