Detector and energy analyzer for energetic-hydrogen in beams and plasmas
- Livermore, CA
- Albuquerque, NM
A detector for detecting energetic hydrogen ions and atoms ranging in energy from about 1 eV up to 1 keV in an evacuated environment includes a Schottky diode with a palladium or palladium-alloy gate metal applied to a silicondioxide layer on an n-silicon substrate. An array of the energetic-hydrogen detectors having a range of energy sensitivities form a plasma energy analyzer having a rapid response time and a sensitivity for measuring fluxes of energetic hydrogen. The detector is sensitive to hydrogen and its isotopes but is insensitive to non-hydrogenic particles. The array of energetic-hydrogen detectors can be formed on a single silicon chip, with thin-film layers of gold metal applied in various thicknesses to successive detectors in the array. The gold layers serve as particle energy-filters so that each detector is sensitive to a different range of hydrogen energies.
- Research Organization:
- AT&T
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4782302
- OSTI ID:
- 866762
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
energy
analyzer
energetic-hydrogen
beams
plasmas
detecting
energetic
hydrogen
atoms
ranging
kev
evacuated
environment
schottky
diode
palladium
palladium-alloy
gate
metal
applied
silicondioxide
layer
n-silicon
substrate
array
detectors
range
sensitivities
form
plasma
rapid
response
time
sensitivity
measuring
fluxes
sensitive
isotopes
insensitive
non-hydrogenic
particles
formed
single
silicon
chip
thin-film
layers
gold
various
thicknesses
successive
serve
particle
energy-filters
energies
particle energy
thin-film layer
film layers
silicon substrate
oxide layer
response time
film layer
rapid response
gate metal
schottky diode
plasma energy
hydrogen detector
evacuated environment
dioxide layer
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