Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith

Patent · Tue Jan 01 00:00:00 EST 1985

OSTI ID:865702

Friedman, Lewis ^[1]; Buehler, Robert J ^[1]; Matthew, Michael W ^[2]; Ledbetter, Myron ^[3]

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1. Patchogue, NY
2. East Patchogue, NY
3. Belle Terre, NY

A method of precisely modifying a selected area of a workpiece by producing a beam of charged cluster ions that is narrowly mass selected to a predetermined mean size of cluster ions within a range of 25 to 10.sup.6 atoms per cluster ion, and accelerated in a beam to a critical velocity. The accelerated beam is used to impact a selected area of an outer surface of the workpiece at a preselected rate of impacts of cluster ions/cm.sup.2 /sec. in order to effect a precise modification in that selected area of the workpiece.

• Research Organization: Associated Universities, Inc., Upton, NY (United States)
• DOE Contract Number: AC02-76CH00016
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4559096
• OSTI ID: 865702
• Country of Publication: United States
• Language: English

Related Subjects

method
precisely
modifying
predetermined
surface
layers
workpiece
cluster
impact
therewith
selected
producing
beam
charged
narrowly
mass
mean
size
range
25
10
atoms
accelerated
critical
velocity
outer
preselected
rate
impacts
cm
effect
precise
modification
outer surface
surface layer
surface layers
predetermined surface
precisely modifying
mass selected
/156/204/219/250/376/427/438/