Annealed CVD molybdenum thin film surface

Patent · Sun Jan 01 00:00:00 EST 1984

OSTI ID:864879

Carver, Gary E ^[1]; Seraphin, Bernhard O ^[1]

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1. Tucson, AZ

Molybdenum thin films deposited by pyrolytic decomposition of Mo(CO).sub.6 attain, after anneal in a reducing atmosphere at temperatures greater than 700.degree. C., infrared reflectance values greater than reflectance of supersmooth bulk molybdenum. Black molybdenum films deposited under oxidizing conditions and annealed, when covered with an anti-reflecting coating, approach the ideal solar collector characteristic of visible light absorber and infrared energy reflector.

• DOE Contract Number: EY-76-S-04-3709
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4431708
• OSTI ID: 864879
• Country of Publication: United States
• Language: English

Related Subjects

annealed
cvd
molybdenum
film
surface
films
deposited
pyrolytic
decomposition
attain
anneal
reducing
atmosphere
temperatures
700
degree
infrared
reflectance
values
supersmooth
bulk
black
oxidizing
conditions
covered
anti-reflecting
coating
approach
ideal
solar
collector
characteristic
visible
light
absorber
energy
reflector
oxidizing conditions
films deposited
infrared energy
reducing atmosphere
solar collector
visible light
film surface
pyrolytic decomposition
reflectance values
reflecting coating
light absorber
/428/359/427/