High power linear pulsed beam annealer

Patent · Sat Jan 01 00:00:00 EST 1983

OSTI ID:864481

Strathman, Michael D ^[1]; Sadana, Devendra K ^[2]; True, Richard B ^[3]

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1. Concord, CA
2. Berkeley, CA
3. Sunnyvale, CA

A high power pulsed electron beam is produced in a system comprised of an electron gun having a heated cathode, control grid, focus ring, and a curved drift tube. The drift tube is maintained at a high positive voltage with respect to the cathode to accelerate electrons passing through the focus ring and to thereby eliminate space charge. A coil surrounding the curved drift tube provides a magnetic field which maintains the electron beam focused about the axis of the tube and imparts motion on electrons in a spiral path for shallow penetration of the electrons into a target. The curvature of the tube is selected so there is no line of sight between the cathode and a target holder positioned within a second drift tube spaced coaxially from the curved tube. The second tube and the target holder are maintained at a reference voltage that decelerates the electrons. A second coil surrounding the second drift tube maintains the electron beam focused about the axis of the second drift tube and compresses the electron beam to the area of the target. The target holder can be adjusted to position the target where the cross section of the beam matches the area of the target.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4371774
• OSTI ID: 864481
• Country of Publication: United States
• Language: English

Related Subjects

power
linear
pulsed
beam
annealer
electron
produced
comprised
gun
heated
cathode
control
grid
focus
curved
drift
tube
maintained
positive
voltage
respect
accelerate
electrons
passing
eliminate
space
charge
coil
surrounding
provides
magnetic
field
maintains
focused
axis
imparts
motion
spiral
path
shallow
penetration
target
curvature
selected
line
sight
holder
positioned
spaced
coaxially
reference
decelerates
compresses
adjusted
position
section
matches
power pulsed
power pulse
power line
magnetic field
electron beam
electron gun
drift tube
reference voltage
space charge
pulsed electron
accelerate electrons
pulsed beam
electrons passing
beam focus
linear pulse
positive voltage
electrons pass
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