Fabricating amorphous silicon solar cells by varying the temperature _of the substrate during deposition of the amorphous silicon layer

Patent · Fri Jan 01 00:00:00 EST 1982

OSTI ID:864267

Carlson, David E ^[1]

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1. Yardley, PA

An improved process for fabricating amorphous silicon solar cells in which the temperature of the substrate is varied during the deposition of the amorphous silicon layer is described. Solar cells manufactured in accordance with this process are shown to have increased efficiencies and fill factors when compared to solar cells manufactured with a constant substrate temperature during deposition of the amorphous silicon layer.

• Research Organization: National Renewable Energy Laboratory (NREL), Golden, CO (United States)
• DOE Contract Number: EG-77-C-01-4042
• Assignee: RCA Corporation (New York, NY)
• Patent Number(s): US 4339470
• OSTI ID: 864267
• Country of Publication: United States
• Language: English

Related Subjects

fabricating
amorphous
silicon
solar
cells
varying
temperature
substrate
deposition
layer
improved
process
varied
described
manufactured
accordance
shown
increased
efficiencies
fill
factors
compared
constant
improved process
silicon layer
amorphous silicon
solar cell
solar cells
silicon solar
substrate temperature
rate temperature
fabricating amorphous
increased efficiencies
fill factor
fill factors
/438/136/427/