Excimer laser with fluoropolymer lining

Patent · Fri Jan 01 00:00:00 EST 1982

OSTI ID:864147

Sze, Robert C ^[1]

---

1. Santa Fe, NM

A cavity formed of Teflon to provide extended static fill lifetimes for gases containing halogens. A double cavity configuration provides structural integrity to the inner Teflon cavity by maintaining an identical multi-atmospheric pressure within the outer structural cavity to minimize tension on the Teflon inner cavity. Use of a quantity of the lasing gas in the outer cavity or a constituent of that gas minimizes contamination of the lasing gas.

• Research Organization: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4318056
• OSTI ID: 864147
• Country of Publication: United States
• Language: English

Related Subjects

excimer
laser
fluoropolymer
lining
cavity
formed
teflon
provide
extended
static
fill
lifetimes
gases
containing
halogens
double
configuration
provides
structural
integrity
inner
maintaining
identical
multi-atmospheric
pressure
outer
minimize
tension
quantity
lasing
gas
constituent
minimizes
contamination
cavity configuration
configuration provides
atmospheric pressure
structural integrity
excimer laser
cavity formed
provides structural
gases containing
provide extended
/372/206/220/359/