Ion-plasma gun for ion-milling machine

Patent · Thu Jan 01 00:00:00 EST 1976

OSTI ID:862721

Kaminsky, Manfred S ^[1]

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1. Hinsdale, IL

An ion gun includes an elongated electrode with a hollow end portion closed by a perforated end plate. The end plate is positioned parallel to a perforated flat electrode of opposite electrical polarity. An insulated sleeve encompasses the elongated electrode and extends outwardly from the perforated end towards the flat electrode. The sleeve length is separated into two portions of different materials. The first is formed of a high-temperature material that extends over the hollow portion of the elongated electrode where the arc is initiated by a point source electrode. The second sleeve portion extending over the remainder of the elongated electrode is of a resilient material for enhanced seal-forming ability and retention of plasma gas. Perforations are arranged in the flat electrode in a mutually opposing triangular pattern to project a plasma beam having a generally flat current profile towards a target requiring precision milling.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL (United States)
• DOE Contract Number: W-31109-ENG-38
• Assignee: United States of America as represented by United States Energy (Washington, DC)
• Patent Number(s): US 3995186
• OSTI ID: 862721
• Country of Publication: United States
• Language: English

Related Subjects

ion-plasma
gun
ion-milling
machine
elongated
electrode
hollow
portion
closed
perforated
plate
positioned
parallel
flat
opposite
electrical
polarity
insulated
sleeve
encompasses
extends
outwardly
towards
length
separated
portions
materials
formed
high-temperature
material
initiated
source
extending
remainder
resilient
enhanced
seal-forming
ability
retention
plasma
gas
perforations
arranged
mutually
opposing
triangular
pattern
beam
current
profile
target
requiring
precision
milling
temperature material
plasma gas
plasma gun
positioned parallel
extends outwardly
elongated electrode
hollow portion
portion extending
resilient material
opposite electrical
extends outward
milling machine
sleeve portion
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