Design and implementation of a vacuum compatible laser-basedsub-nm resolution absolute distance measurement gauge
Journal Article
·
· Optical Engineering
OSTI ID:860299
We describe the design and implementation of a vacuum compatible laser-based absolute distance measurement gauge with sub-nm resolution. The present system is compatible with operation in the 10{sup -8} Torr range and with some minor modifications could be used in the 10{sup -9} Torr range. The system is based on glancing incidence reflection and dual segmented diode detection. The system has been implemented as a focus sensor for extreme ultraviolet interferometry and microlithography experiments at Lawrence Berkeley National Laboratory's Advanced Light Source synchrotron radiation facility and 1{sigma} operational measurement noise floor of 0.26 nm has been demonstrated.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Director. Office of Science. Office of Basic EnergySciences
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 860299
- Report Number(s):
- LBNL-54636; OPEGAR; R&D Project: 81EA01; BnR: 600303000; TRN: US0504891
- Journal Information:
- Optical Engineering, Vol. 44, Issue 1; Related Information: Journal Publication Date: 01/2005; ISSN 0091-3286
- Country of Publication:
- United States
- Language:
- English
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