Design and implementation of a vacuum compatible laser-basedsub-nm resolution absolute distance measurement gauge

Journal Article · Mon Feb 16 00:00:00 EST 2004 · Optical Engineering

OSTI ID:860299

Naulleau, Patrick P; Denham, Paul E; Rekawa, Senajith

We describe the design and implementation of a vacuum compatible laser-based absolute distance measurement gauge with sub-nm resolution. The present system is compatible with operation in the 10{sup -8} Torr range and with some minor modifications could be used in the 10{sup -9} Torr range. The system is based on glancing incidence reflection and dual segmented diode detection. The system has been implemented as a focus sensor for extreme ultraviolet interferometry and microlithography experiments at Lawrence Berkeley National Laboratory's Advanced Light Source synchrotron radiation facility and 1{sigma} operational measurement noise floor of 0.26 nm has been demonstrated.

• Research Organization: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
• Sponsoring Organization: USDOE Director. Office of Science. Office of Basic EnergySciences
• DOE Contract Number: DE-AC02-05CH11231
• OSTI ID: 860299
• Report Number(s): LBNL-54636; OPEGAR; R&D Project: 81EA01; BnR: 600303000; TRN: US0504891
• Journal Information: Optical Engineering, Vol. 44, Issue 1; Related Information: Journal Publication Date: 01/2005; ISSN 0091-3286
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
36 MATERIALS SCIENCE
ADVANCED LIGHT SOURCE
DESIGN
DETECTION
FLOORS
IMPLEMENTATION
INTERFEROMETRY
MODIFICATIONS
REFLECTION
RESOLUTION
SYNCHROTRON RADIATION