Fatigue of polycrystalline silicon for MEMS applications: Crack growth and stability under resonant loading conditions
Journal Article
·
· Mechanics of Materials
OSTI ID:837916
Although bulk silicon is not known to exhibit susceptibility to cyclic fatigue, micron-scale structures made from silicon films are known to be vulnerable to degradation by fatigue in ambient air environments, a phenomenon that has been recently modeled in terms of a mechanism of sequential oxidation and stress-corrosion cracking of the native oxide layer.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Director, Office of Science. Office of Basic Energy Sciences. Division of Materials Sciences (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 837916
- Report Number(s):
- LBNL-49308; R&D Project: 511906; TRN: US200507%%51
- Journal Information:
- Mechanics of Materials, Vol. 36, Issue 1-2; Other Information: Submitted to Mechanics of Materials: Volume 36, No.1-2; Journal Publication Date: 01/02/2004; PBD: 5 Dec 2001
- Country of Publication:
- United States
- Language:
- English
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