Toward green systems for cleanrooms: Energy efficient fan-filter units
The paper presents results of laboratory-measured performance of fan-filter units (FFUs) used for cleanrooms. A total of twenty FFUs collected from the market were tested, including thirteen 1220 mm x 610 mm (or 4 ft x 2 ft) units and seven 1220 mm x 1220 mm (or 4 ft x 4 ft) units. The paper concludes that there are wide variations in FFUs energy performance, and that there are opportunities in improving energy efficiency and lowering operating costs of FFUs. Furthermore, the paper suggests the benefits of having a uniform method for testing and reporting FFU performance. Such a testing method and recommended practice guideline is under development, with heavy input from FFU suppliers, users, and independent institutions that include Lawrence Berkeley National Laboratory (LBNL), Industrial Technology Research Institute (ITRI), and Institute of Environmental Sciences and Technology (IEST). An integrated approach with the participation from designers, suppliers, users, and utility companies can help to identify energy-efficient FFUs that are required for many cleanroom applications.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE. Assistant Secretary for Energy Efficiency and Renewable Energy. Office of the Building Technologies Program.State and Community Programs; California Energy Commission's Industrial section of the Public Interest Energy Research (PIER) Program (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 833571
- Report Number(s):
- LBNL-55039; R&D Project: E12003; TRN: US200430%%1637
- Resource Relation:
- Conference: SEMICON West Conference 2004, San Francisco, CA (US), 07/12/2004--07/14/2004; Other Information: PBD: 12 Jul 2004
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
POLICY AND ECONOMY
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
54 ENVIRONMENTAL SCIENCES
ENERGY EFFICIENCY
MARKET
OPERATING COST
PERFORMANCE
RECOMMENDATIONS
TESTING
CLEANROOM FAN-FILTER UNIT (FFU) ENERGY EFFICIENCY GREEN SYSTEM ELECTRIC POWER USE ENERGY PERFORMANCE INDEX OPERATING COST