Reaching sub-Angstrom resolution with a mid-voltage TEM
Phase-contrast imaging in the high-resolution electron microscope produces images with peaks at atom positions by extracting the spatial distribution of the relative phase from the electron wave. Usually, the electron wave is imaged by direct interference of diffracted beams at optimum focus. Instead, the One-Angstrom Microscope uses focal-series reconstruction software to derive the relative electron phase from a series of images taken over a range of focus, with peaks that correspond to the atom positions at a resolution that extends to the microscope information limit. Tests using a silicon specimen tilted into [112] orientation show that the O Angstrom M has achieved a world-record resolution of 0.78 Angstrom.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Director. Office of Science. Office of Basic Energy Sciences. Materials Sciences Division (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 824287
- Report Number(s):
- LBNL-54892; R&D Project: 503836; TRN: US200417%%272
- Resource Relation:
- Other Information: PBD: 12 Apr 2004
- Country of Publication:
- United States
- Language:
- English
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