A Carbon Nanotube Electron Source Based Ionization Vacuum Gauge

Journal Article · Wed Oct 01 00:00:00 EDT 2003

OSTI ID:816499

Dong, Changkun; Myneni, Ganapati

The results of fabrication and performance of an ionization vacuum gauge using a carbon nanotube (CNT) electron source are presented. The electron source was constructed with multi-wall nanotubes (MWNT), which were grown using thermal chemical vapor deposition (CVD) process. The electron emission of the source was stable in vacuum pressure up to 10-7 Torr, which is better than the metal field emitters. The measurement linearity of the gauge was better than {+-}10% from 10-6 to 10-10 Torr. The gauge sensitivity of 4 Torr-1 was achieved under 50 {micro}A electron emission in nitrogen. The gauge is expected to find applications in vacuum measurements from 10-7 Torr to below 10-11 Torr.

• Research Organization: Thomas Jefferson National Accelerator Facility (TJNAF), Newport News, VA (United States)
• Sponsoring Organization: USDOE Office of Energy Research (ER) (US)
• DOE Contract Number: AC05-84ER40150
• OSTI ID: 816499
• Report Number(s): JLAB-ACC-03-176; DOE/ER/40150-2569; TRN: US200320%%604
• Resource Relation: Other Information: No journal information given for this preprint; PBD: 1 Oct 2003
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARBON
CHEMICAL VAPOR DEPOSITION
ELECTRON EMISSION
ELECTRON SOURCES
FABRICATION
IONIZATION
NITROGEN
PERFORMANCE
SENSITIVITY