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Title: High Gain, Fast Scan, Broad Spectrum, Parallel Beam Wavelength Dispersive X-ray Spectrometer for SEM

Technical Report ·
DOI:https://doi.org/10.2172/814961· OSTI ID:814961

Parallax Research, Inc. proposes to produce a new type of x-ray spectrometer for use with Scanning Electron Microscopy (SEM) that would have the energy resolution of WDS and the ease of use of EDS with sufficient gain for lower energies that it can be used at low beam currents as is EDS. Parallax proposes to do this by development of new multiple reflection x-ray collimation optics, new diffractor technology, new detector technology and new scan algorithms.

Research Organization:
Parallax Research, Inc. (US)
Sponsoring Organization:
USDOE Office of Science (SC) (US)
DOE Contract Number:
FG02-02ER83545
OSTI ID:
814961
Report Number(s):
Final Report; TRN: US200322%%19
Resource Relation:
Other Information: PBD: 12 Sep 2003
Country of Publication:
United States
Language:
English