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Title: High Gain, Fast Scan, Broad Spectrum, Parallel Beam Wavelength Dispersive X-ray Spectrometer for SEM

Abstract

Parallax Research, Inc. proposes to produce a new type of x-ray spectrometer for use with Scanning Electron Microscopy (SEM) that would have the energy resolution of WDS and the ease of use of EDS with sufficient gain for lower energies that it can be used at low beam currents as is EDS. Parallax proposes to do this by development of new multiple reflection x-ray collimation optics, new diffractor technology, new detector technology and new scan algorithms.

Authors:
;
Publication Date:
Research Org.:
Parallax Research, Inc. (US)
Sponsoring Org.:
USDOE Office of Science (SC) (US)
OSTI Identifier:
814961
Report Number(s):
Final Report
TRN: US200322%%19
DOE Contract Number:  
FG02-02ER83545
Resource Type:
Technical Report
Resource Relation:
Other Information: PBD: 12 Sep 2003
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; ALGORITHMS; BEAM CURRENTS; ENERGY RESOLUTION; OPTICS; REFLECTION; SCANNING ELECTRON MICROSCOPY; WAVELENGTHS; X-RAY SPECTROMETERS; X-RAY SPECTROSCOPY; SEM; WDS; MICRO-ANALYSIS

Citation Formats

OHara, David, and Lochmer, Eric. High Gain, Fast Scan, Broad Spectrum, Parallel Beam Wavelength Dispersive X-ray Spectrometer for SEM. United States: N. p., 2003. Web. doi:10.2172/814961.
OHara, David, & Lochmer, Eric. High Gain, Fast Scan, Broad Spectrum, Parallel Beam Wavelength Dispersive X-ray Spectrometer for SEM. United States. https://doi.org/10.2172/814961
OHara, David, and Lochmer, Eric. 2003. "High Gain, Fast Scan, Broad Spectrum, Parallel Beam Wavelength Dispersive X-ray Spectrometer for SEM". United States. https://doi.org/10.2172/814961. https://www.osti.gov/servlets/purl/814961.
@article{osti_814961,
title = {High Gain, Fast Scan, Broad Spectrum, Parallel Beam Wavelength Dispersive X-ray Spectrometer for SEM},
author = {OHara, David and Lochmer, Eric},
abstractNote = {Parallax Research, Inc. proposes to produce a new type of x-ray spectrometer for use with Scanning Electron Microscopy (SEM) that would have the energy resolution of WDS and the ease of use of EDS with sufficient gain for lower energies that it can be used at low beam currents as is EDS. Parallax proposes to do this by development of new multiple reflection x-ray collimation optics, new diffractor technology, new detector technology and new scan algorithms.},
doi = {10.2172/814961},
url = {https://www.osti.gov/biblio/814961}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Sep 12 00:00:00 EDT 2003},
month = {Fri Sep 12 00:00:00 EDT 2003}
}