Microstructures of GaN and In{sub x}Ga{sub 1-x}N films grown by MOCVD on free-standing GaN templates
Abstract
We summarize structural properties of thick HVPE GaN templates from the point of view of their application as substrates for growth of nitride layers. This is followed by the results of optical and structural studies, mostly transmission electron microscopy, of nitride layers grown by MOCVD on top of the HVPE substrates. The results indicate high structural quality of these layers with a low density of threading dislocations (in the range of 10{sup 6} cm{sup -2}). Convergent beam electron diffraction studies showed that the MOCVD GaN films have Ga-polarity, the same polarity as the HVPE GaN substrates. Structural studies of an InGaN layer grown on top of the MOCVD GaN film showed the presence of two layers, which differed in lattice parameter and composition. The upper layer, on the top of the structure had a c-lattice parameter about 2% larger than that of GaN and contained 10.3 {+-} 0.8% of In. Values measured for the thinner, intermediate layer adjacent to the GaN layer were about 2 .5 times lower.
- Authors:
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- Air Force Office of Scientific Research, Order No. AFOSR-ISSA-00-0011 (US)
- OSTI Identifier:
- 795385
- Report Number(s):
- LBNL-50186
R&D Project: 43CA01; TRN: US200301%%656
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Conference
- Resource Relation:
- Conference: 2002 MRS Spring Meeting, San Francisco, CA (US), 04/01/2002--04/05/2002; Other Information: Supercedes report DE00795385; PBD: 30 Apr 2002; Materials Research Society Symposium Proceedings. Vol. 722, pp. 205-210, 2002; PBD: 30 Apr 2002
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; DISLOCATIONS; ELECTRON DIFFRACTION; LATTICE PARAMETERS; NITRIDES; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY
Citation Formats
Jasinski, J, Liliental-Weber, Z, Huang, D, Reshchikov, M A, Yun, F, Morkoc, H, Sone, C, Park, S S, and Lee, K Y. Microstructures of GaN and In{sub x}Ga{sub 1-x}N films grown by MOCVD on free-standing GaN templates. United States: N. p., 2002.
Web.
Jasinski, J, Liliental-Weber, Z, Huang, D, Reshchikov, M A, Yun, F, Morkoc, H, Sone, C, Park, S S, & Lee, K Y. Microstructures of GaN and In{sub x}Ga{sub 1-x}N films grown by MOCVD on free-standing GaN templates. United States.
Jasinski, J, Liliental-Weber, Z, Huang, D, Reshchikov, M A, Yun, F, Morkoc, H, Sone, C, Park, S S, and Lee, K Y. 2002.
"Microstructures of GaN and In{sub x}Ga{sub 1-x}N films grown by MOCVD on free-standing GaN templates". United States. https://www.osti.gov/servlets/purl/795385.
@article{osti_795385,
title = {Microstructures of GaN and In{sub x}Ga{sub 1-x}N films grown by MOCVD on free-standing GaN templates},
author = {Jasinski, J and Liliental-Weber, Z and Huang, D and Reshchikov, M A and Yun, F and Morkoc, H and Sone, C and Park, S S and Lee, K Y},
abstractNote = {We summarize structural properties of thick HVPE GaN templates from the point of view of their application as substrates for growth of nitride layers. This is followed by the results of optical and structural studies, mostly transmission electron microscopy, of nitride layers grown by MOCVD on top of the HVPE substrates. The results indicate high structural quality of these layers with a low density of threading dislocations (in the range of 10{sup 6} cm{sup -2}). Convergent beam electron diffraction studies showed that the MOCVD GaN films have Ga-polarity, the same polarity as the HVPE GaN substrates. Structural studies of an InGaN layer grown on top of the MOCVD GaN film showed the presence of two layers, which differed in lattice parameter and composition. The upper layer, on the top of the structure had a c-lattice parameter about 2% larger than that of GaN and contained 10.3 {+-} 0.8% of In. Values measured for the thinner, intermediate layer adjacent to the GaN layer were about 2 .5 times lower.},
doi = {},
url = {https://www.osti.gov/biblio/795385},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 30 00:00:00 EDT 2002},
month = {Tue Apr 30 00:00:00 EDT 2002}
}