Enhanced Sensitivity of Micro Mechanical Chemical Sensors Through Structural Variation

Conference · Mon Apr 16 00:00:00 EDT 2001

OSTI ID:788503

Harris, J C

Chemical detection devices are very effective; however, their bulkiness makes them undesirable for portable applications. The next generation of chemical detectors is microscopic mechanical devices capable of measuring trace amounts of chemical vapor within the environment. The chemicals do not react directly with the detector, instead intermolecular forces cause chemicals to adhere to the surface. This surface adhesion of the chemical creates surface stress on the detectors leading to measurable movement. Modifications to the structural design of these microstructures have resulted in signal enhancement to over seven hundred percent.

• Research Organization: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC05-00OR22725
• OSTI ID: 788503
• Report Number(s): P00-109372; TRN: US200201%%215
• Resource Relation: Conference: ERULF Student Symposium, Conference location not supplied, Conference dates not supplied; Other Information: PBD: 16 Apr 2001
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
MEASURING INSTRUMENTS
MINIATURIZATION
DESIGN
DETECTION
INTERMOLECULAR FORCES
MODIFICATIONS
SENSITIVITY
TRACE AMOUNTS
GAS ANALYSIS