Energetic Deposition in Vacuum

Conference · Sat Sep 01 00:00:00 EDT 2001

OSTI ID:786146

Wu, G; Phillips, L; Sundelin, R; Goodman, T

In hoping to improve Niobium deposition on Copper cavity, a vacuum deposition system has been built to test the idea of Nb energetic condensation on copper substrate. The system directly uses microwave power to create the pure Nb plasma, which can be used to extract energetic Nb ion flux to do direct deposition on copper substrate. In this paper, we briefly describe the system, discuss the potential benefit of this technique and report the initial result of Nb plasma creation and Niobium thin film deposition.

• Research Organization: Thomas Jefferson National Accelerator Facility (TJNAF), Newport News, VA (United States)
• Sponsoring Organization: USDOE Office of Energy Research (ER) (US)
• DOE Contract Number: AC05-84ER40150
• OSTI ID: 786146
• Report Number(s): JLAB-OTP-01-03; DOE/ER/40150-1900; TRN: US0108819
• Resource Relation: Conference: 10th SRF Workshop, Tsukuba (JP), 09/06/2001--09/11/2001; Other Information: PBD: 1 Sep 2001
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
COPPER
PHYSICAL VAPOR DEPOSITION
NIOBIUM
THIN FILMS
VACUUM COATING