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Title: The Polychromator: A programmable MEMS diffraction grating for synthetic spectra

Abstract

The authors report here the design, fabrication and demonstration of an electrostatically actuated MEMS diffractive optical device, the Polychromator grating. The Polychromator grating enables a new type of correlation spectrometer for remote detection of a wide range of chemical species, offering electronic programmability, high specificity and sensitivity, fast response and ruggedness. Significant results include: (1) The first demonstrations of user-defined synthetic spectra in the 3-5 {micro}m wavelength regime based upon controlled deflection of individual grating elements in the Polychromator grating; (2) The first demonstration of gas detection by correlation spectroscopy using synthetic spectra generated by the Polychromator grating.

Authors:
; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
756074
Report Number(s):
SAND2000-0975C
TRN: AH200021%%112
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC (US), 06/04/2000--06/08/2000; Other Information: PBD: 17 Apr 2000
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; 42 ENGINEERING; DIFFRACTION GRATINGS; MINIATURIZATION; DESIGN; FABRICATION; PERFORMANCE; ABSORPTION SPECTROSCOPY; SPECTROMETERS; REMOTE SENSING; COMPUTERIZED CONTROL SYSTEMS

Citation Formats

HOCKER, G B, YOUNGNER, D, BUTLER, MICHAEL A, SINCLAIR, MICHAEL B, PLOWMAN, THOMAS E, DEUTSCH, E, VOLPICELLI, A, SENTURIA, S, and RICCO, A J. The Polychromator: A programmable MEMS diffraction grating for synthetic spectra. United States: N. p., 2000. Web.
HOCKER, G B, YOUNGNER, D, BUTLER, MICHAEL A, SINCLAIR, MICHAEL B, PLOWMAN, THOMAS E, DEUTSCH, E, VOLPICELLI, A, SENTURIA, S, & RICCO, A J. The Polychromator: A programmable MEMS diffraction grating for synthetic spectra. United States.
HOCKER, G B, YOUNGNER, D, BUTLER, MICHAEL A, SINCLAIR, MICHAEL B, PLOWMAN, THOMAS E, DEUTSCH, E, VOLPICELLI, A, SENTURIA, S, and RICCO, A J. 2000. "The Polychromator: A programmable MEMS diffraction grating for synthetic spectra". United States. https://www.osti.gov/servlets/purl/756074.
@article{osti_756074,
title = {The Polychromator: A programmable MEMS diffraction grating for synthetic spectra},
author = {HOCKER, G B and YOUNGNER, D and BUTLER, MICHAEL A and SINCLAIR, MICHAEL B and PLOWMAN, THOMAS E and DEUTSCH, E and VOLPICELLI, A and SENTURIA, S and RICCO, A J},
abstractNote = {The authors report here the design, fabrication and demonstration of an electrostatically actuated MEMS diffractive optical device, the Polychromator grating. The Polychromator grating enables a new type of correlation spectrometer for remote detection of a wide range of chemical species, offering electronic programmability, high specificity and sensitivity, fast response and ruggedness. Significant results include: (1) The first demonstrations of user-defined synthetic spectra in the 3-5 {micro}m wavelength regime based upon controlled deflection of individual grating elements in the Polychromator grating; (2) The first demonstration of gas detection by correlation spectroscopy using synthetic spectra generated by the Polychromator grating.},
doi = {},
url = {https://www.osti.gov/biblio/756074}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Apr 17 00:00:00 EDT 2000},
month = {Mon Apr 17 00:00:00 EDT 2000}
}

Conference:
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