skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: MEMS reliability in a vibration environment

Abstract

MicroElectricalMechanical Systems (MEMS) were subjected to a vibration environment that had a peak acceleration of 120g and spanned frequencies from 20 to 2000 Hz. The device chosen for this test was a surface-micromachined microengine because it possesses many elements (springs, gears, rubbing surfaces) that may be susceptible to vibration. The microengines were unpowered during the test. The authors observed 2 vibration-related failures and 3 electrical failures out of 22 microengines tested. Surprisingly, the electrical failures also arose in four microengines in the control group indicating that they were not vibration related. Failure analysis revealed that the electrical failures were due to shorting of stationary comb fingers to the ground plane.

Authors:
; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
751178
Report Number(s):
SAND2000-0329C
TRN: AH200020%%108
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: International Reliability Physics Symposium, San Jose, CA (US), 04/10/2000--04/13/2000; Other Information: PBD: 3 Feb 2000
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; ACTUATORS; MINIATURIZATION; MECHANICAL VIBRATIONS; MOTORS; RELIABILITY; FAILURE MODE ANALYSIS

Citation Formats

TANNER, DANELLE M, WALRAVEN, JEREMY A, HELGESEN, KAREN SUE, IRWIN, LLOYD W, GREGORY, DANNY LYNN, STAKE, JOHN R, and SMITH, NORMAN F. MEMS reliability in a vibration environment. United States: N. p., 2000. Web.
TANNER, DANELLE M, WALRAVEN, JEREMY A, HELGESEN, KAREN SUE, IRWIN, LLOYD W, GREGORY, DANNY LYNN, STAKE, JOHN R, & SMITH, NORMAN F. MEMS reliability in a vibration environment. United States.
TANNER, DANELLE M, WALRAVEN, JEREMY A, HELGESEN, KAREN SUE, IRWIN, LLOYD W, GREGORY, DANNY LYNN, STAKE, JOHN R, and SMITH, NORMAN F. 2000. "MEMS reliability in a vibration environment". United States. https://www.osti.gov/servlets/purl/751178.
@article{osti_751178,
title = {MEMS reliability in a vibration environment},
author = {TANNER, DANELLE M and WALRAVEN, JEREMY A and HELGESEN, KAREN SUE and IRWIN, LLOYD W and GREGORY, DANNY LYNN and STAKE, JOHN R and SMITH, NORMAN F},
abstractNote = {MicroElectricalMechanical Systems (MEMS) were subjected to a vibration environment that had a peak acceleration of 120g and spanned frequencies from 20 to 2000 Hz. The device chosen for this test was a surface-micromachined microengine because it possesses many elements (springs, gears, rubbing surfaces) that may be susceptible to vibration. The microengines were unpowered during the test. The authors observed 2 vibration-related failures and 3 electrical failures out of 22 microengines tested. Surprisingly, the electrical failures also arose in four microengines in the control group indicating that they were not vibration related. Failure analysis revealed that the electrical failures were due to shorting of stationary comb fingers to the ground plane.},
doi = {},
url = {https://www.osti.gov/biblio/751178}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Feb 03 00:00:00 EST 2000},
month = {Thu Feb 03 00:00:00 EST 2000}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share: