MEMS reliability in a vibration environment
Abstract
MicroElectricalMechanical Systems (MEMS) were subjected to a vibration environment that had a peak acceleration of 120g and spanned frequencies from 20 to 2000 Hz. The device chosen for this test was a surface-micromachined microengine because it possesses many elements (springs, gears, rubbing surfaces) that may be susceptible to vibration. The microengines were unpowered during the test. The authors observed 2 vibration-related failures and 3 electrical failures out of 22 microengines tested. Surprisingly, the electrical failures also arose in four microengines in the control group indicating that they were not vibration related. Failure analysis revealed that the electrical failures were due to shorting of stationary comb fingers to the ground plane.
- Authors:
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- US Department of Energy (US)
- OSTI Identifier:
- 751178
- Report Number(s):
- SAND2000-0329C
TRN: AH200020%%108
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Conference
- Resource Relation:
- Conference: International Reliability Physics Symposium, San Jose, CA (US), 04/10/2000--04/13/2000; Other Information: PBD: 3 Feb 2000
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; ACTUATORS; MINIATURIZATION; MECHANICAL VIBRATIONS; MOTORS; RELIABILITY; FAILURE MODE ANALYSIS
Citation Formats
TANNER, DANELLE M, WALRAVEN, JEREMY A, HELGESEN, KAREN SUE, IRWIN, LLOYD W, GREGORY, DANNY LYNN, STAKE, JOHN R, and SMITH, NORMAN F. MEMS reliability in a vibration environment. United States: N. p., 2000.
Web.
TANNER, DANELLE M, WALRAVEN, JEREMY A, HELGESEN, KAREN SUE, IRWIN, LLOYD W, GREGORY, DANNY LYNN, STAKE, JOHN R, & SMITH, NORMAN F. MEMS reliability in a vibration environment. United States.
TANNER, DANELLE M, WALRAVEN, JEREMY A, HELGESEN, KAREN SUE, IRWIN, LLOYD W, GREGORY, DANNY LYNN, STAKE, JOHN R, and SMITH, NORMAN F. 2000.
"MEMS reliability in a vibration environment". United States. https://www.osti.gov/servlets/purl/751178.
@article{osti_751178,
title = {MEMS reliability in a vibration environment},
author = {TANNER, DANELLE M and WALRAVEN, JEREMY A and HELGESEN, KAREN SUE and IRWIN, LLOYD W and GREGORY, DANNY LYNN and STAKE, JOHN R and SMITH, NORMAN F},
abstractNote = {MicroElectricalMechanical Systems (MEMS) were subjected to a vibration environment that had a peak acceleration of 120g and spanned frequencies from 20 to 2000 Hz. The device chosen for this test was a surface-micromachined microengine because it possesses many elements (springs, gears, rubbing surfaces) that may be susceptible to vibration. The microengines were unpowered during the test. The authors observed 2 vibration-related failures and 3 electrical failures out of 22 microengines tested. Surprisingly, the electrical failures also arose in four microengines in the control group indicating that they were not vibration related. Failure analysis revealed that the electrical failures were due to shorting of stationary comb fingers to the ground plane.},
doi = {},
url = {https://www.osti.gov/biblio/751178},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Feb 03 00:00:00 EST 2000},
month = {Thu Feb 03 00:00:00 EST 2000}
}