A hard x-ray scanning microprobe for fluorescence imaging and microdiffraction at the Advanced Photon Source
A hard x-ray scanning microprobe based on zone plate optics and undulator radiation, in the energy region from 6 to 20 keV, has reached a focal spot size (FWHM) of 0.15 {micro}m (v) x 0.6 {micro}m (h), and a photon flux of 4 x 10{sup 9} photons/sec/0.01%BW. Using a slit 44 meters upstream to create a virtual source, a circular beam spot of 0.15 {micro}m in diameter can be obtained with a photon flux of one order of magnitude less. During fluorescence mapping of trace elements in a single human ovarian cell, the microprobe exhibited an imaging sensitivity for Pt (L{sub a} line) of 80 attograms/{micro}m{sup 2} for a count rate of 10 counts per second. The x-ray microprobe has been used to map crystallographic strain and multiquantum well thickness in micro-optoelectronic devices produced with the selective area growth technique.
- Research Organization:
- Argonne National Lab., IL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 750575
- Report Number(s):
- ANL/XFD/CP-100395; TRN: US0003506
- Resource Relation:
- Conference: XRM '99, Berkeley, CA (US), 06/04/1999--06/05/1999; Other Information: PBD: 2 Nov 1999
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ADVANCED PHOTON SOURCE
ACCELERATOR FACILITIES
USES
X-RAY FLUORESCENCE ANALYSIS
MICROANALYSIS
X-RAY DIFFRACTION
OPTICAL SYSTEMS
TRACE AMOUNTS
SENSITIVITY
MICROSCOPY