Improved adhesion for SiO/sub 2/ particles in silica substrates using helium-ion irradiation

Conference · Tue Mar 01 00:00:00 EST 1988

OSTI ID:7248282

Musket, R G; Thomas, I M

We have examined the effects of irradiation with 200-keV helium ions on the adhesion and optical transmission properties of 220 nm thick antireflective, optical coatings that consisted of layers of spherical, 20 nm diameter silica particles. In the as-deposited state these sol-gel coatings have very low adhesion to the fused silica subtrates. Results for adhesion and optical transmission have been obtained for doses of 10/sup 13/-10/sup 17/ Hecm/sup 2/. Significant improvement in adhesion was found for doses exceeding about 2 /times/ 10/sup 14/ Hecm/sup 2/. Optical transmission measurements for wavelengths of 200-1200 nm showed increasing absorption with dose. We have evidence that the helium ions decompose various contaminants in the coating into two types of degradation products. One is volatile and the other remains in the coating as optically absorbing species. UVoxidative-gas treatment effectively removes the absorbing species.

• Research Organization: Lawrence Berkeley Lab., CA (USA)
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 7248282
• Report Number(s): UCRL-97598; CONF-880408-14; ON: DE88008915
• Resource Relation: Conference: Spring meeting of the Materials Research Society, Reno, NV, USA, 4 Apr 1988
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ANTIREFLECTION COATINGS
PHYSICAL RADIATION EFFECTS
SILICA
OPTICAL PROPERTIES
ADHESION
HELIUM IONS
KEV RANGE 100-1000
TRANSMISSION
CHALCOGENIDES
CHARGED PARTICLES
COATINGS
ENERGY RANGE
IONS
KEV RANGE
MINERALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATION EFFECTS
SILICON COMPOUNDS
SILICON OXIDES
360605* - Materials- Radiation Effects