Pumping of hydrocarbons using non-evaporable getters
Conference
·
OSTI ID:6989975
Pumping speed measurements have been obtained for a number of gaseous hydrocarbons including members of the alkene, alkadiene, and cycloalkane groups as a function of temperature using a Zr-Al alloy getter. Pumping speeds were obtained by analysis of an exponential least squares fit to the pressure decay curve following introduction of each gas. It was found that these pumping speeds are relatively high (up to 400 1/s) and exhibit, with only a few exceptions, little temperature dependence. This is in contrast to the earlier reported results for the alkane series.
- Research Organization:
- Princeton Univ., NJ (USA). Plasma Physics Lab.
- DOE Contract Number:
- AC02-76CH03073; AC05-84OR21400
- OSTI ID:
- 6989975
- Report Number(s):
- CONF-861019-17; ON: DE87002181
- Resource Relation:
- Conference: 10. international vacuum congress and 6. international conference on solid surfaces and the 33. national symposium of the American Vacuum Society, Baltimore, MD, USA, 27 Oct 1986
- Country of Publication:
- United States
- Language:
- English
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