The theory and practice of high resolution scanning electron microscopy
- Tennessee Univ., Knoxville, TN (USA) Oak Ridge National Lab., TN (USA)
Recent advances in instrumentation have produced the first commercial examples of what can justifiably be called High Resolution Scanning Electron Microscopes. The key components of such instruments are a cold field emission gun, a small-gap immersion probe-forming lens, and a clean dry-pumped vacuum. The performance of these microscopes is characterized by several major features including a spatial resolution, in secondary electron mode on solid specimens, which can exceed 1nm on a routine basis; an incident probe current density of the order of 10{sup 6} amps/cm{sup 2}; and the ability to maintain these levels of performance over an accelerating voltage range of from 1 to 30keV. This combination of high resolution, high probe current, low contamination and flexible electron-optical conditions provides many new opportunitites for the application of the SEM to materials science, physics, and the life sciences. 27 refs., 14 figs.
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- Sponsoring Organization:
- DOE/ER
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 6800558
- Report Number(s):
- CONF-9005145-1; ON: DE91000718
- Resource Relation:
- Conference: International conference on frontiers of electron microscopy, Oak Brook, IL (USA), 21-24 May 1990
- Country of Publication:
- United States
- Language:
- English
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