Mechanical properties of Cu/Ta multilayers prepared by magnetron sputtering
Abstract
The microstructure and mechanical properties of sputtered Cu/Ta multilayers were studied. X- ray diffraction and transmission electron microscopy characterization indicate that both the Ta and Cu in the 2 nm period multilayer are predominantly amorphous, while in longer period samples, the layers are crystalline, with the metastable tetragonal {beta}-Ta observed. No observable microstructure changes upon annealing at 300{degrees}C were found. An average Vickers micro- hardness value of about 5.5 GPa was measured, which increases about 5% upon annealing at 300{degrees}C. Residual stress in the multilayers and its dependence on thermal annealing are reported. The relationships between microstructure and mechanical properties in the multilayers are discussed.
- Authors:
- Publication Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 665625
- Report Number(s):
- UCRL-JC-130782; CONF-980405-
ON: DE98057690; BR: YN0100000
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Conference
- Resource Relation:
- Conference: Spring meeting of the Materials Research Society, San Francisco, CA (United States), 13-17 Apr 1998; Other Information: PBD: 1 Apr 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; MICROSTRUCTURE; CURIUM ALLOYS; TANTALUM ALLOYS; SPUTTERING; ANNEALING; MECHANICAL PROPERTIES
Citation Formats
Nguyen, T D, and Barbee, Jr, T W. Mechanical properties of Cu/Ta multilayers prepared by magnetron sputtering. United States: N. p., 1998.
Web.
Nguyen, T D, & Barbee, Jr, T W. Mechanical properties of Cu/Ta multilayers prepared by magnetron sputtering. United States.
Nguyen, T D, and Barbee, Jr, T W. 1998.
"Mechanical properties of Cu/Ta multilayers prepared by magnetron sputtering". United States. https://www.osti.gov/servlets/purl/665625.
@article{osti_665625,
title = {Mechanical properties of Cu/Ta multilayers prepared by magnetron sputtering},
author = {Nguyen, T D and Barbee, Jr, T W},
abstractNote = {The microstructure and mechanical properties of sputtered Cu/Ta multilayers were studied. X- ray diffraction and transmission electron microscopy characterization indicate that both the Ta and Cu in the 2 nm period multilayer are predominantly amorphous, while in longer period samples, the layers are crystalline, with the metastable tetragonal {beta}-Ta observed. No observable microstructure changes upon annealing at 300{degrees}C were found. An average Vickers micro- hardness value of about 5.5 GPa was measured, which increases about 5% upon annealing at 300{degrees}C. Residual stress in the multilayers and its dependence on thermal annealing are reported. The relationships between microstructure and mechanical properties in the multilayers are discussed.},
doi = {},
url = {https://www.osti.gov/biblio/665625},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Apr 01 00:00:00 EST 1998},
month = {Wed Apr 01 00:00:00 EST 1998}
}