A hinged-pad test structure for sliding friction measurement in micromachining
Conference
·
OSTI ID:663238
The authors describe the design, modeling, fabrication and initial testing of a new test structure for friction measurement in MEMS. The device consists of a cantilevered forked beam and a friction pad attached via a hinge. Compared to previous test structures, the proposed structure can measure friction over much larger pressure ranges, yet occupies one hundred times less area. The placement of the hinge is crucial to obtaining a well-known and constant pressure distribution in the device. Static deflections on the device were measured and modeled numerically, Preliminary results indicate that friction pad slip is sensitive to friction pad normal force.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE Office of Financial Management and Controller, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 663238
- Report Number(s):
- SAND-98-1759C; CONF-980918-; ON: DE98007268; BR: YN0100000; TRN: AHC29818%%70
- Resource Relation:
- Conference: Micromachining and microfabrication symposium, Santa Clara, CA (United States), 21-22 Sep 1998; Other Information: PBD: [1998]
- Country of Publication:
- United States
- Language:
- English
Similar Records
Integrated modeling and testing of a micro hinged structure for sliding friction measurement
Micromachine friction test apparatus
Acceleration of dormant storage effects to address the reliability of silicon surface micromachined Micro-Electro-Mechanical Systems (MEMS).
Conference
·
Sat Aug 01 00:00:00 EDT 1998
·
OSTI ID:663238
Micromachine friction test apparatus
Patent
·
Tue Jan 01 00:00:00 EST 2002
·
OSTI ID:663238
Acceleration of dormant storage effects to address the reliability of silicon surface micromachined Micro-Electro-Mechanical Systems (MEMS).
Technical Report
·
Thu Jun 01 00:00:00 EDT 2006
·
OSTI ID:663238
+8 more