Ambient pressure effects on the sputter particle distribution of insulating materials

Conference · Mon Jul 01 00:00:00 EDT 1985

OSTI ID:6597837

Glaser, J W

The effect of ion bombardment on several grades of alumina was investigated. Changes in the electrical resistance of the substrate as a function of incoming ion energy were of particular interest. Attention was also paid to the sputter particle distribution as a function of ambient pressure. This distribution was found to be dependent on the ion to substrate mass ratio. In general, the distribution follows a curve of growth; approximating a cosine distribution at the lower pressures and mass ratio, becoming isotropic at higher pressures. Pressures in the range of 10/sup -2/ to 10/sup -4/ Pascals have been used along with mass ratios in the range of 0.40 to 1.3. Samples of up to 80 cm/sup 2/ were subjected to a 10 cm diameter ion beam at energies of up to 6.25 keV. Average ion current densities of 1ma/cm/sup 2/ were used. Substrate temperatures while subjected to the ion beam were also monitored.

• Research Organization: Lawrence Livermore National Lab., CA (USA)
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 6597837
• Report Number(s): UCRL-92396; CONF-850781-3; ON: DE87008753
• Resource Relation: Conference: International conference on radiation effects in insulators, Guildford, Surrey, UK, 15 Jul 1985
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM OXIDES
SPUTTERING
ELECTRIC CONDUCTIVITY
ION BEAMS
PHYSICAL RADIATION EFFECTS
ALUMINIUM COMPOUNDS
BEAMS
CHALCOGENIDES
ELECTRICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATION EFFECTS
656003* - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)