Further development of a facility for channeling studies: application to lattice location
Equipment modifications at the Lawrence Berkeley Laboratory (LBL) Rutherford backscattering facility, including the addition of a high precision goniometer, have been made to enhance the performance of channeling experiments. The angular divergence of the alpha particle beam was also reduced to <0.05/sup 0/ by improving the collimation. To demonstrate improved channeling capability angular scans were performed about the (100), (110), and (111) axial channels of a 3400 A (100) silicon membrane. Both the minimum yield, chi/sub min/, and the critical angle, psi/sub 1/2/, were consistent with accepted values. A preliminary investigation of the lattice location of cobalt on the (100) silicon surface was undertaken. Approximately 4.5 x 10/sup 15/ Co atoms/cm/sup 2/ were electron beam deposited on a 3900 A, HF etched silicon membrane in a system using oilless pumps. Preliminary channeling data taken approximately one month later indicated a preferred site for approximately 16% of the cobalt atoms. Channeling data obtained six months later with the new goniometer showed no evidence for a preferred site. Room temperature oxidation between experiments was observed and is thought to have affected the location of the cobalt atoms. 33 references, 15 figures.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 6588873
- Report Number(s):
- LBL-18185; ON: DE84016890
- Resource Relation:
- Other Information: Portions are illegible in microfiche products. Thesis
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
GENERAL PHYSICS
ALPHA PARTICLES
CHANNELING
SILICON
ION CHANNELING
CRYSTAL LATTICES
EXPERIMENTAL DATA
IMPURITIES
MONOCRYSTALS
ORIENTATION
RUTHERFORD SCATTERING
CHARGED PARTICLES
CRYSTAL STRUCTURE
CRYSTALS
DATA
ELASTIC SCATTERING
ELEMENTS
INFORMATION
NUMERICAL DATA
SCATTERING
SEMIMETALS
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions