Processing and quantification of x-ray energy dispersive spectra in the Analytical Electron Microscope

Conference · Mon Aug 01 00:00:00 EDT 1988

OSTI ID:6551303

Zaluzec, N J

Spectral processing in x-ray energy dispersive spectroscopy deals with the extraction of characteristic signals from experimental data. In this text, the four basic procedures for this methodology are reviewed and their limitations outlined. Quantification, on the other hand, deals with the interpretation of the information obtained from spectral processing. Here the limitations are for the most part instrumental in nature. The prospects of higher voltage operation does not, in theory, present any new problems and may in fact prove to be more desirable assuming that electron damage effects do not preclude analysis. 28 refs., 6 figs.

• Research Organization: Argonne National Lab., IL (USA)
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 6551303
• Report Number(s): CONF-8802127-3; ON: DE89003654; TRN: 89-003281
• Resource Relation: Conference: Workshop on electron-beam induced spectroscopies at very high spatial resolution, Aussois, France, 29 Feb 1988; Other Information: Portions of this document are illegible in microfiche products
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE
X-RAY SPECTRA
DATA PROCESSING
CROSS SECTIONS
DATA ACQUISITION SYSTEMS
ELECTRON MICROSCOPES
ELECTRON MICROSCOPY
MICROSCOPES
MICROSCOPY
PROCESSING
SPECTRA
656003* - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)
990230 - Mathematics & Mathematical Models- (1987-1989)