Integrated micro-electro-mechanical sensor development for inertial applications
Conference
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OSTI ID:654099
- and others
Electronic sensing circuitry and micro electro mechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper will describe the Sandia M3EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 654099
- Report Number(s):
- SAND-98-0574C; CONF-980420-; ON: DE98004105; BR: 4050GB010; TRN: AHC2DT05%%183
- Resource Relation:
- Conference: Position location and navigation symposium, Rancho Mirage, CA (United States), 20-23 Apr 1998; Other Information: PBD: Apr 1998
- Country of Publication:
- United States
- Language:
- English
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