Application of microfabrication technology to thermionic energy conversion. Progress report No. 6, November 1, 1980-January 31, 1981

Technical Report · Mon Mar 09 00:00:00 EST 1981

DOI:https://doi.org/10.2172/6511915· OSTI ID:6511915

Brodie, I; Shepherd, C; Spindt, C A

Effort was directed toward the fabrication of a micron-spaced thermionic converter diode. This technique demonstrated that interelectrode spacings down to 1.5 ..mu..m could be obtained. Several methods of duplicating the emitter and collector surfaces were also investigated. Two new techniques are proposed; both stem from an earlier idea of using evaporation, photolithography, and etching techniques. These two fabrication methods yielded a one-piece diode structure with a thick-film copper collector, eliminating the need to physically duplicate the electrode surfaces and realign the electrodes. Effort has also been directed toward a more detailed theoretical analysis of micron-spaced thermionic converter performance. Taking into account heat losses through the interelectrode support structure, it is likely that the maximum energy conversion efficiency may be greatest at a spacing somewhat larger than 1 micron (..mu..m), but less than 10 ..mu..m.

• Research Organization: SRI International, Menlo Park, CA (USA). Engineering Sciences Lab.
• DOE Contract Number: AC02-79ET15423
• OSTI ID: 6511915
• Report Number(s): DOE/ET/15423-6; ON: DE81024986
• Country of Publication: United States
• Language: English

Related Subjects

30 DIRECT ENERGY CONVERSION
THERMIONIC CONVERTERS
FABRICATION
MICROELECTRONICS
EFFICIENCY
HEAT LOSSES
PERFORMANCE
THERMIONIC DIODES
DIODE TUBES
DIRECT ENERGY CONVERTERS
ELECTRON TUBES
ENERGY LOSSES
LOSSES
THERMIONIC TUBES
NESDPS Office of Nuclear Energy Space and Defense Power Systems
300401* - Thermionic Converters- Design & Development