Designing and operating electrostatically driven microengines
Microelectromechanical engines that convert the linear outputs from dual orthogonal electrostatic actuators to rotary motion were first developed in 1993. Referred to as microengines, these early devices demonstrated the potential of microelectromechanical technology, but, as expected from any first-of-its-kind device, were not yet optimized. Yield was relatively low, and the 10 micronewtons of force generated by the actuators was not always enough to ensure reliable operation. Since initial development, these engines have undergone a continuous series of significant improvements on three separate fronts: design, fabrication, and electrical activation. Although all three areas will be discussed, emphasis will be on aspects related to mechanical design and generation of the electrical waveforms used to drive these devices. Microtransmissions that dramatically increase torque will also be discussed. Electrostatically driven microengines can be operated at hundreds of thousands of revolutions per minute making large gear reduction ratios feasible; overall ratios of 3,000,000:1 have been successfully demonstrated. Today`s microengines have evolved into high endurance (one test device has seen over 7,000,000,000 revolutions), high yield, robust devices that have become the primary actuation source for MicroElectroMechanical Systems (MEMS) at Sandia National Laboratories.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE Office of Financial Management and Controller, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 650279
- Report Number(s):
- SAND-98-0493C; CONF-980527-; ON: DE98004108; BR: YN0100000; TRN: AHC2DT04%%192
- Resource Relation:
- Conference: 44. international Instrument Society meeting, Reno, NV (United States), 3-7 May 1998; Other Information: PBD: Feb 1998
- Country of Publication:
- United States
- Language:
- English
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