Cross sections for inelastic scattering of electrons by atoms: selected topics related to electron microscopy
We begin with a resume of the Bethe theory, which provides a general framework for discussing the inelastic scattering of fast electrons and leads to powerful criteria for judging the reliability of cross-section data. The central notion of the theory is the generalized oscillator strength as a function of both the energy transfer and the momentum transfer, and is the only non-trivial factor in the inelastic-scattering cross section. Although the Bethe theory was initially conceived for free atoms, its basic ideas apply to solids, with suitable generalizations; in this respect, the notion of the dielectric response function is the most fundamental. Topics selected for discussion include the generalized oscillator strengths for the K-shell and L-shell ionization for all atoms with Z less than or equal to 30, evaluated by use of the Hartree-Slater potential. As a function of the energy transfer, the generalized oscillator strength most often shows a non-monotonic structure near the K-shell and L-shell thresholds, which has been interpreted as manifestations of electron-wave propagation through atomic fields. For molecules and solids, there are additional structures due to the scattering of ejected electrons by the fields of other atoms.
- Research Organization:
- Argonne National Lab., IL (USA); Georgia State Univ., Atlanta (USA). Dept. of Physics and Astronomy
- DOE Contract Number:
- W-31-109-ENG-38
- OSTI ID:
- 6369744
- Report Number(s):
- CONF-8204113-1; ON: DE83007185
- Resource Relation:
- Conference: Conference on electron beam interactions and solids for microscopy, microanalysis and microlithography, Asilomar, CA, USA, 18 Apr 1982; Other Information: Portions are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ELECTRON-ATOM COLLISIONS
INELASTIC SCATTERING
DIFFERENTIAL CROSS SECTIONS
ELECTRON MICROSCOPY
ENERGY TRANSFER
INNER-SHELL IONIZATION
IONIZATION
MATHEMATICAL MODELS
MOMENTUM TRANSFER
OSCILLATOR STRENGTHS
ATOM COLLISIONS
COLLISIONS
CROSS SECTIONS
ELECTRON COLLISIONS
MICROSCOPY
SCATTERING
640304* - Atomic
Molecular & Chemical Physics- Collision Phenomena