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Title: Argonne's performance assessment of major facility systems to support semiconductor manufacturing by the National Security Agency/R Group, Ft. Meade, Maryland

Abstract

The National Security Agency (NSA) was authorized in 1983 to construct a semiconductor and circuit-board manufacturing plant at its Ft. Meade, Maryland, facility. This facility was to become known as the Special Process Laboratories (SPL) building. Phase I construction was managed by the US Army Corps of Engineers, Baltimore District (USACE/BD) and commenced in January 1986. Phase I construction provided the basic building and support systems, such as the heating, ventilating, and air-conditioning system, the deionized-water and wastewater-treatment systems, and the high-purity-gas piping system. Phase II construction involved fitting the semiconductor manufacturing side of the building with manufacturing tools and enhancing various aspects of the Phase I construction. Phase II construction was managed by NSA and commenced in April 1989. Argonne National Laboratory (ANL) was contracted by USACE/BD midway through the Phase I construction period to provide quality-assured performance reviews of major facility systems in the SPL. Following completion of the Phase I construction, ANL continued its performance reviews under NSA sponsorship, focusing its attention on the enhancements to the various manufacturing support systems of interest. The purpose of this document is to provide a guide to the files that were generated by ANL during its term of technical assistancemore » to USACE/BD and NSA and to explain the quality assurance program that was implemented when ANL conducted its performance reviews of the SPL building's systems. One set of the ANL project files is located at NSA, Ft. Meade, and two sets are at Argonne, Illinois. The ANL sets will be maintained until the year 2000, or for the 10-year estimated life of the project. 1 fig.« less

Authors:
;
Publication Date:
Research Org.:
Argonne National Lab., IL (USA). Energy Systems Div.
Sponsoring Org.:
USDOD
OSTI Identifier:
6330109
Report Number(s):
ANL/ESD/TM-11
ON: DE91005318
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; INDUSTRIAL PLANTS; QUALITY ASSURANCE; SEMICONDUCTOR DEVICES; BUILDINGS; CLEAN ROOMS; CONSTRUCTION; DESIGN; DOCUMENTATION; ELECTRONIC CIRCUITS; FILTERS; INFORMATION; INSPECTION; INTEGRATED CIRCUITS; MAINTENANCE; MANUFACTURING; PERFORMANCE; PIPES; RECORDS MANAGEMENT; WASTE PROCESSING; WASTE WATER; HYDROGEN COMPOUNDS; LIQUID WASTES; MANAGEMENT; MICROELECTRONIC CIRCUITS; OXYGEN COMPOUNDS; PROCESSING; WASTE MANAGEMENT; WASTES; WATER; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-); 420200 - Engineering- Facilities, Equipment, & Techniques

Citation Formats

Harrison, W, and Miller, G M. Argonne's performance assessment of major facility systems to support semiconductor manufacturing by the National Security Agency/R Group, Ft. Meade, Maryland. United States: N. p., 1990. Web. doi:10.2172/6330109.
Harrison, W, & Miller, G M. Argonne's performance assessment of major facility systems to support semiconductor manufacturing by the National Security Agency/R Group, Ft. Meade, Maryland. United States. https://doi.org/10.2172/6330109
Harrison, W, and Miller, G M. 1990. "Argonne's performance assessment of major facility systems to support semiconductor manufacturing by the National Security Agency/R Group, Ft. Meade, Maryland". United States. https://doi.org/10.2172/6330109. https://www.osti.gov/servlets/purl/6330109.
@article{osti_6330109,
title = {Argonne's performance assessment of major facility systems to support semiconductor manufacturing by the National Security Agency/R Group, Ft. Meade, Maryland},
author = {Harrison, W and Miller, G M},
abstractNote = {The National Security Agency (NSA) was authorized in 1983 to construct a semiconductor and circuit-board manufacturing plant at its Ft. Meade, Maryland, facility. This facility was to become known as the Special Process Laboratories (SPL) building. Phase I construction was managed by the US Army Corps of Engineers, Baltimore District (USACE/BD) and commenced in January 1986. Phase I construction provided the basic building and support systems, such as the heating, ventilating, and air-conditioning system, the deionized-water and wastewater-treatment systems, and the high-purity-gas piping system. Phase II construction involved fitting the semiconductor manufacturing side of the building with manufacturing tools and enhancing various aspects of the Phase I construction. Phase II construction was managed by NSA and commenced in April 1989. Argonne National Laboratory (ANL) was contracted by USACE/BD midway through the Phase I construction period to provide quality-assured performance reviews of major facility systems in the SPL. Following completion of the Phase I construction, ANL continued its performance reviews under NSA sponsorship, focusing its attention on the enhancements to the various manufacturing support systems of interest. The purpose of this document is to provide a guide to the files that were generated by ANL during its term of technical assistance to USACE/BD and NSA and to explain the quality assurance program that was implemented when ANL conducted its performance reviews of the SPL building's systems. One set of the ANL project files is located at NSA, Ft. Meade, and two sets are at Argonne, Illinois. The ANL sets will be maintained until the year 2000, or for the 10-year estimated life of the project. 1 fig.},
doi = {10.2172/6330109},
url = {https://www.osti.gov/biblio/6330109}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Dec 01 00:00:00 EST 1990},
month = {Sat Dec 01 00:00:00 EST 1990}
}