Comparison of two common methods of surface-topography evaluation
Some of the advantages and limitations of two methods used for surface topography evaluation, the dual beam interference microscope and the stylus type profiling instrument, are compared. Consideration is primarily limited to diamond machined or other high quality surfaces, such as are commonly encountered on optical elements. Parameters discussed include horizontal and vertical resolution, horizontal and vertical range, and surface damage.
- Research Organization:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- DOE Contract Number:
- W-7405-ENG-36
- OSTI ID:
- 5768612
- Report Number(s):
- LA-UR-81-3070; CONF-8106166-1; ON: DE82002372
- Resource Relation:
- Journal Volume: 21; Journal Issue: 6; Conference: Conference on conical optical element metrology, Albuquerque, NM, USA, 24 Jun 1981
- Country of Publication:
- United States
- Language:
- English
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