Stability of multilayers for short-wavelength optics

Conference · Sat Mar 01 00:00:00 EST 1986

OSTI ID:5756720

Ziegler, E; Lepetre, Y; Schuller, I K; Viccaro, P J; Spiller, E

A variety of multilayer mirrors with transition metal absorber layers (W-C, Wre-C, Co-C, and Cr-C) have been fabricated and tested up to 1000 C using standard 0.20 x-ray diffraction, Debye-Scherrer scattering and microcleavage transmission electron microscopy. The 0-20 x-ray diffraction during annealing shows the Bragg peak position to shift toward lower angles with increasing temperature. This irreversible shift starts at around 300 C and is equivalent to as much as 12% expansion of the multilayer period with a temperature change from ambient to 750 C. In all cases a crystallization occurs in the metal component between 650-750 C. The different types of crystalline compounds formed have been identified by the Debye-Scherrer technique. As a consequence of this crystallization abrupt changes occur in the multilayer structure. Electron microscopy shows that the surface roughness increases by formation of hillocks and the layered structure is destroyed. Moreover the x-ray reflectivity decreases considerably. The expansion and crystallization are of great importance in cases where a precise multilayer period is required or in devices intended for high x-ray flux applications.

• Research Organization: Argonne National Lab., IL (USA); International Business Machines Corp., Yorktown Heights, NY (USA). Thomas J. Watson Research Center
• DOE Contract Number: W-31-109-ENG-38
• OSTI ID: 5756720
• Report Number(s): CONF-860316-9; ON: DE86012129; TRN: 86-020647
• Resource Relation: Conference: Topical meeting on short wave length coherent radiation, Monterey, CA, USA, 24 Mar 1986; Other Information: Portions of this document are illegible in microfiche products
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
MIRRORS
STABILITY
BRAGG CURVE
CARBON
CHROMIUM
COBALT
CRYSTALLIZATION
ELECTRON DIFFRACTION
LAYERS
RHENIUM ALLOYS
THERMAL CYCLING
TUNGSTEN
TUNGSTEN ALLOYS
X-RAY DIFFRACTION
ALLOYS
COHERENT SCATTERING
DIAGRAMS
DIFFRACTION
ELEMENTS
METALS
NONMETALS
PHASE TRANSFORMATIONS
SCATTERING
TRANSITION ELEMENTS
360102* - Metals & Alloys- Structure & Phase Studies