Description of a unique machine tool permitting achievement of < 15-A rms diamond-turned surfaces
A new machine tool now in the final stages of development at the Pacific Northwest Laboratory uses a unique tool motion to produce diamond-turned surfaces of exceptionally high quality. The cutting tool is programmed to move in 4-nm increments along two axes: an X axis and an Omega axis. Exceptionally stiff and accurate control of the tool is possible with this Omega-X system. Copper surfaces of revolution have been produced with a 12.3-A rms surface finish and a contour accuracy of 75 nm. In conjunction with a unique, thermally stabilized air bearing spindle and machine calibration equipment, the Omega-X system permits a significant advance in the fabrication of optical-quality surfaces for use with the visible spectrum.
- Research Organization:
- Battelle Pacific Northwest Labs., Richland, WA (United States)
- DOE Contract Number:
- EY-76-C-06-1830
- OSTI ID:
- 5685142
- Report Number(s):
- PNL-SA-6870(Rev.)
- Country of Publication:
- United States
- Language:
- English
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Omega-X micromachining system
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