In situ ion-beam analysis and modification of sol-gel zirconia thin films
- Cornell Univ., Ithaca, NY (United States). Dept. of Materials Science and Engineering
- Los Alamos National Lab., NM (United States)
- Arizona State Univ., Tempe, AZ (United States). Dept. of Chemical, Bio and Materials Science Engineering
We report the investigation of ion-beam-induced densification of sol-gel zirconia thin films via in situ ion backscattering spectrometry. We have irradiated three regions of a sample with neon, argon, and krypton ions. For each ion species, a series of irradiation and analysis steps were performed using an interconnected 3 MV tandem accelerator. The technique offers the advantages of minimizing the variation of experimental parameters and sequentially monitoring the densification phenomenon with increasing ion dose.
- Research Organization:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Organization:
- Department of Defense, Washington, DC (United States); USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-36
- OSTI ID:
- 55301
- Report Number(s):
- LA-UR-95-1436; CONF-950220-7; ON: DE95010994; CNN: Contract DAAL03-89-K-0154.; TRN: 95:013156
- Resource Relation:
- Conference: 9. international conference on ion beam modification of materials, Canberra (Australia), 5-10 Feb 1995; Other Information: PBD: [1995]
- Country of Publication:
- United States
- Language:
- English
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