A hard x-ray prototype production exposure station at NSLS
Exposures conducted at the NSLS R and D beamline (X-27B) for High Aspect Ratio Precision Manufacture have proven sufficiently successful that the authors are constructing a dedicated hard x-ray exposure beamline. The new beamline (X-14B) provides an exposure field {approximately} 120 mm wide, three times larger than that of X-27B. The scanner is based on the hydraulic system from the X-27B program. It is optimized for planar exposures and takes advantage of the full 525 mm stroke available. Exposures of multiple substrates and masks will be possible, with the fixturing supporting mounting of substrate holders from other groups (ALS, APS, CAMD, and UW). The function of this beamline is to establish a hard x-ray exposure station where manufacturing scale protocols can be developed and ultimately exploited for production runs.
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 541872
- Report Number(s):
- BNL-64629; CONF-9706176-; ON: DE97008877; BR: KC0204011; TRN: 98:008393
- Resource Relation:
- Conference: HARMST `97: high aspects ration micro systems technology, Madison, WI (United States), 20-21 Jun 1997; Other Information: PBD: Jul 1997
- Country of Publication:
- United States
- Language:
- English
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