Performance of the Phase 1 superconducting x-ray lithography source (SXLS) at BNL

Conference · Wed Jan 01 00:00:00 EST 1992

OSTI ID:5382215

Murphy, J B; Biscardi, R; Halama, H; Heese, R; Kramer, S; Nawrocky, R ^[1]; Krishnaswamy, J ^[2]

---

1. Brookhaven National Lab., Upton, NY (United States)
2. Grumman Aerospace Corp., Bethpage, NY (United States)

The Phase I SXLS electron storage ring has a circumference of 8.5 meters, it uses conventional dipole magnets, B {le} 1.1 T and p = 60 cm, and it is capable of operating in the range of 50--250 MeV. It is the forerunner of the Phase II SXLS ring which will operate at 700 MeV and will make use of superconducting dipoles, B{sub o} = 3.87 Tesla, as a source of {lambda}{sub c} = 10 angstrom x-rays for proximity printing lithography. The Phase I storage ring has been successfully commissioned; stored currents in excess of one ampere have been achieved. A report on the performance of the machine is presented.

• Research Organization: Brookhaven National Lab., Upton, NY (United States)
• Sponsoring Organization: USDOE; USDOE, Washington, DC (United States)
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 5382215
• Report Number(s): BNL-47377; CONF-920315-38; ON: DE92014171
• Resource Relation: Conference: 3. European particle accelerator conference, Berlin (Germany), 24-28 Mar 1992
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
07 ISOTOPES AND RADIATION SOURCES
X-RAY SOURCES
PERFORMANCE
BEAM BUNCHING
ELECTRON BEAMS
FEEDBACK
INSTABILITY
NSLS
RF SYSTEMS
STORAGE RINGS
SUPERCONDUCTING MAGNETS
ACCELERATORS
BEAM DYNAMICS
BEAMS
CYCLIC ACCELERATORS
ELECTRICAL EQUIPMENT
ELECTROMAGNETS
EQUIPMENT
LEPTON BEAMS
MAGNETS
PARTICLE BEAMS
RADIATION SOURCES
SUPERCONDUCTING DEVICES
SYNCHROTRON RADIATION SOURCES
SYNCHROTRONS
X-RAY EQUIPMENT
430400* - Particle Accelerators- Storage Rings
070201 - Radiation Sources- Design
Fabrication & Operation