Optical measurement of micromachine engine performance
Understanding the mechanisms that impact the performance of Microelectromechanical Systems (MEMS) is essential to the development of optimized designs and drive signals, as well as the qualification of devices for commercial applications. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 {mu}m in diameter and can be driven at rotation rates exceeding 300,000 rpm. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. The authors describe the development of Micromachine Optical Probe (MOP) technology for the evaluation of micromachine performance. The MOP approach is based on the detection of optical signals scattered by the gear teeth or other physical structures. They present experimental results for a prototype system designed to measure engine parameters as well as long term performance data.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 519118
- Report Number(s):
- SAND-97-1653C; CONF-970968-1; ON: DE97007138; TRN: 97:004955
- Resource Relation:
- Conference: SPIE symposium on micromachining and microfabrication, Austin, TX (United States), 29-30 Sep 1997; Other Information: PBD: 1997
- Country of Publication:
- United States
- Language:
- English
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