Glow discharge techniques for conditioning high vacuum systems
A review is given of glow discharge techniques which are useful for conditioning vacuum vessels for high vacuum applications. Substantial development of glow discharge techniques has been done for the purpose of in-situ conditioning of the large ultrahigh vacuum systems for particle accelerators and magnetic fusion devices. In these applications the glow discharge treatments remove impurities from vessel surfaces in order to minimize particle-induced desorption coefficients. Cleaning mechanisms involve a mixture of sputtering and ion- (or neutral) induced desorption effects depending on the gas mixture (ArO/sub 2/ vs. H/sub 2/) and excitation method (DC, RF, and ECR). The author will review the methodology of glow discharge conditioning, diagnostic measurements provided by residual gas and surface composition analysis, and applications to vessel conditioning and materials processing. 76 refs., 16 figs.
- Research Organization:
- Princeton Univ., NJ (USA). Plasma Physics Lab.
- DOE Contract Number:
- AC02-76CH03073
- OSTI ID:
- 5091994
- Report Number(s):
- PPPL-2503; CONF-871125-23; ON: DE88009339; TRN: 88-021422
- Resource Relation:
- Conference: 34. national vacuum symposium and topical conference, Anaheim, CA, USA, 2 Nov 1987
- Country of Publication:
- United States
- Language:
- English
Similar Records
Glow discharge conditioning techniques for synchrotron vacuum vessels
Glow discharge conditioning of the PDX vacuum vessel